Substrate used and its cell potential measurement device, method of manufacturing the cell potential measurement device substrate

摘要

PROBLEM TO BE SOLVED: To improve the adhesion with a through hole of a cell and improve the measurement precision of a device for measuring cellular potential.;SOLUTION: This substrate for the device for measuring the cellular potential includes a single crystal substrate 15 that has a first surface and a second surface facing the first surface and has a diamond structure of (100) plane orientation. A depression 20 is formed in the first surface, through holes 21 are formed from the depression 20 toward the second surface, the depression 20 has an inner wall that extends from openings of the through holes 21 to the outer periphery, bends, and leads to the first surface, and the diameter of the through holes 21 is longer than 0 μm and 3 μm or shorter. Thus, the surface roughness of the inner wall of the depression 20 can be reduced, adhesion of a cell with the through holes 21 can be improved, and as a result, the measurement precision of the device 11 for measuring the cellular potential can be improved.;COPYRIGHT: (C)2011,JPO&INPIT