In the photo mask for the versatile taking and the photo mask for the versatile taking which

摘要

PPROBLEM TO BE SOLVED: To provide a multiple-production photomask equalizing opening sizes of patterns of a multiple-production substrate, a method for manufacturing an electrooptical device, and electronic equipment with the electrooptical device manufactured by the manufacturing method mounted thereon. PSOLUTION: The multiple-production photomask 1 has a plurality of mask regions 2, each mask region 2 has a plurality of opening parts 3. When the multiple-production mask 1 is a positive type, the size of opening part 3 in each mask region 2 is made larger in steps from the center part to the outer periphery. PCOPYRIGHT: (C)2005,JPO&NCIPI