Inspection result analysis method and inspection result analysis apparatus, abnormal equipment detection method and abnormal equipment detection apparatus, program for causing a computer to execute the inspection result analysis method or abnormal equipment detection method, and a computer-readable record recording the program Medium

摘要

In a certain process in a manufacturing line, an angle, which indicates the difference between a first board loading direction in which a board tested in the past is loaded onto equipment which executes the process and a second board loading direction in which a board to be analyzed is loaded onto the equipment, is calculated. Second board in-plane property distribution information is rotated so as to eliminate the angle. The rotated second board in-plane property distribution information is checked with first board in-plane property distribution information.