INSPECTION RESULT ANALYZING METHOD AND INSPECTION RESULT ANALYZING DEVICE, ABNORMAL FACILITY DETECTING METHOD AND ABNORMAL FACILITY DETECTING DEVICE, PROGRAM FOR ENABLING COMPUTER TO EXECUTE INSPECTION RESULT ANALYZING METHOD OR ABNORMAL FACILITY DETECTING METHOD, AND COMPUTER-READABLE RECORDING MEDIUM WHERE PROGRAM IS RECORDED

摘要

PPROBLEM TO BE SOLVED: To provide an inspection result analyzing method for accurately collating in a short time, first substrate in-plane characteristic distribution information representing inspection results of a reference substrate inspected previously in a manufacturing line with second substrate in-plane characteristic distribution information representing inspection results of a target substrate for analysis actually inspected. PSOLUTION: The inspection result analyzing method includes a process in the manufacturing line including the steps of: calculating an angle representing a difference between a first substrate loading direction where the substrate previously inspected for a facility for executing the process is loaded and a second substrate loading direction where the target substrate for analysis is loaded (S101); rotating the second substrate in-plane characteristic distribution information to eliminate the angle (S102); and collating the rotated second substrate in-plane characteristic distribution information with the first substrate in-plane characteristic distribution information (S103). PCOPYRIGHT: (C)2011,JPO&INPIT