首页> 外国专利> TEST RESULT ANALYSIS METHOD AND TEST RESULT ANALYSIS DEVICE, ABNORMAL EQUIPMENT DETECTION METHOD AND ABNORMAL EQUIPMENT DETECTION DEVICE, PROGRAM FOR CAUSING COMPUTER TO EXECUTE THE TEST RESULT ANALYSIS METHOD AND ABNORMAL EQUIPMENT DETECTION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM WITH THE PROGRAM RECORDED THEREON

TEST RESULT ANALYSIS METHOD AND TEST RESULT ANALYSIS DEVICE, ABNORMAL EQUIPMENT DETECTION METHOD AND ABNORMAL EQUIPMENT DETECTION DEVICE, PROGRAM FOR CAUSING COMPUTER TO EXECUTE THE TEST RESULT ANALYSIS METHOD AND ABNORMAL EQUIPMENT DETECTION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM WITH THE PROGRAM RECORDED THEREON

机译:测试结果分析方法和测试结果分析装置,异常设备检测方法和异常设备检测装置,使计算机执行测试结果分析方法和异常设备检测方法的程序,以及使用该程序记录的计算机可读记录介质

摘要

In a certain process in a manufacturing line, an angle, which indicates the difference between a first board loading direction in which a board tested in the past is loaded onto equipment which executes the process and a second board loading direction in which a board to be analyzed is loaded onto the equipment, is calculated. Second board in-plane property distribution information is rotated so as to eliminate the angle. The rotated second board in-plane property distribution information is checked with first board in-plane property distribution information.
机译:在生产线中的特定过程中,角度表示在过去将经过测试的板的第一板加载方向加载到执行该过程的设备上的角度与第二个板加载方向之间的差值将分析后的数据加载到设备上,进行计算。旋转第二板面内特性分布信息以消除该角度。旋转后的第二基板面内特性分布信息与第一基板面内特性分布信息一起被检查。

著录项

  • 公开/公告号WO2010137463A1

    专利类型

  • 公开/公告日2010-12-02

    原文格式PDF

  • 申请/专利权人 SHARP KABUSHIKI KAISHA;IMAI KATSUKI;

    申请/专利号WO2010JP58084

  • 发明设计人 IMAI KATSUKI;

    申请日2010-05-13

  • 分类号H01L21/66;H01L21/02;

  • 国家 WO

  • 入库时间 2022-08-21 18:00:27

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