X-ray diffraction apparatus and the angle correction method in X-ray diffraction measurement

摘要

PPROBLEM TO BE SOLVED: To provide an angle correction method of an X-ray diffraction measuring method which enables a more accurate correction of the machine error of a goniometer than before. PSOLUTION: The intensity (ISBR/SB) of a diffraction line at every angle (2θ) of diffraction is measured in relation to a standard sample, an error (Δ2θ) at every angle (2θ) of diffraction is calculated from the comparison of the intensity (ISBR/SB) of the diffraction line with the intensity (ISBRtru/SB) of the real value of the standard sample, the error (Δ2θ) and a system error (Δ2θSB0/SB) are substituted for the formula: Δ2θSBm/SB=Δ2θ-Δ2θSB0/SBto calculate the machine error (Δ2θSBm/SB) at every angle (2θ) of diffraction, the intensity (I) of the diffraction line at every angle (2θ) of diffraction is measured in relation to a measuring sample, the angle (2θ) of diffraction and the machine error (Δ2θSBm/SB) calculated in relation to the measuring sample is substituted for the formula: 2θSBK/SB=2θ+Δ2θSBm/SBto calculate the calibrated angle (2θSBK/SB) of diffraction. Then, an equal interval angle (2θSBT/SB) of diffraction is set on the basis of the calibrated angle (2θSBK/SB) of diffraction and the intensity (I) of the diffraction line of the measuring sample is distributed to the equal interval angle (2θSBT/SB) of diffraction at a predetermined distribution ratio. PCOPYRIGHT: (C)2008,JPO&INPIT