MICROSENSOR PRODUCED IN MICROSYSTEM TECHNOLOGIES FOR THE MEASUREMENT AND/OR DETECTION OF FOULING

摘要

A sensor (10; 34) for measuring and/or detecting fouling that forms directly or indirectly on a so-called front surface of the sensor, includes the following in the form of a plurality of superimposed layers: -at least one heating element (14) that is able to diffuse, on command, a homogenous, monitored heat flow whose heat output is less than 200 mW, -a heat insulator (11) located on the side opposite the front surface of the sensor to prevent dissipation of the heat flow from the opposite side, -at least one temperature measuring element (16) that is placed in the homogenous heat flow diffused by the at least one heating element and that offers a precision of temperature measurement of better than 0.1° C., and -a substrate (12; 42) on which the layers of the at least one heating element and at least one temperature measuring element are connected.