METHODS FOR PRECISE LASER MICROMACHINING

摘要

Methods for laser micromachining a material are disclosed. The methods include machining a hole in the material by guiding a laser along a predefined path or applying the laser at a predefined beam angle. A shape of the hole is then characterized. Then, the difference between the shape of the hole and a target shape for the hole is calculated. The predefined path or beam angle of the laser is adjusted based on the difference between the shape of the hole and the target shape for the hole.