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MICROMECHANICAL COMPONENT, OPTICAL DEVICE, MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN OPTICAL DEVICE

机译:微机械部件,光学设备,微机械部件的制造方法以及光学设备的制造方法

摘要

A micromechanical component is described having a component which has a moth-eye structure which covers at least a partial surface of the component. At least a portion of the partial surface, as a first contact surface, may contact a contact component of the micromechanical component on at least one second contact area of the contact component, which has a needle-shaped microstructure, the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. Alternatively or additionally, at least a portion of the partial surface may be at least one partial area of an outer side and/or of an exposed inner side, facing the inner space, of the component configured as a light window. Also described is an optical device having such a micromechanical component, a manufacturing method for a micromechanical component, and a manufacturing method for an optical device.
机译:描述了一种微机械部件,其具有具有蛾眼结构的部件,该蛾眼结构覆盖部件的至少一部分表面。作为第一接触表面的部分表面的至少一部分可以在接触部件的至少一个第二接触区域上接触微机械部件的接触部件,该第二接触区域具有针状微观结构,即蛾眼结构。第一接触区域和第二接触区域的针状微观结构至少部分地彼此互锁。替代地或附加地,部分表面的至少一部分可以是被构造为光窗的部件的面向内部空间的外侧和/或暴露的内侧的至少一个局部区域。还描述了具有这种微机械部件的光学器件,用于微机械部件的制造方法以及用于光学器件的制造方法。

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