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MICROMECHANICAL COMPONENT, OPTICAL DEVICE, MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN OPTICAL DEVICE
MICROMECHANICAL COMPONENT, OPTICAL DEVICE, MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR AN OPTICAL DEVICE
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机译:微机械部件,光学设备,微机械部件的制造方法以及光学设备的制造方法
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摘要
A micromechanical component is described having a component which has a moth-eye structure which covers at least a partial surface of the component. At least a portion of the partial surface, as a first contact surface, may contact a contact component of the micromechanical component on at least one second contact area of the contact component, which has a needle-shaped microstructure, the moth-eye structure of the first contact area and the needle-shaped microstructure of the second contact area being at least partially interlocked with one another. Alternatively or additionally, at least a portion of the partial surface may be at least one partial area of an outer side and/or of an exposed inner side, facing the inner space, of the component configured as a light window. Also described is an optical device having such a micromechanical component, a manufacturing method for a micromechanical component, and a manufacturing method for an optical device.
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