Micromechanical component, optical device, method for producing a micromechanical component and method for manufacturing an optical device

摘要

The present invention relates to a micromechanical component with a component (56), which has a moth''s eye structure, the at least one surface portion (62, 64, 66) of the component (56) covers. At least a part of the surface portion (62, 64, 66) can be in the form of a first contact surface (66) a contact - component (58) of the micromechanical component on at least a second contact surface (68) of the contact - component (58), which has a needle-shaped microstructure, contacting, wherein the moth''s eye structure of the first contact surface (66) and the needle-shaped microstructure of the second contact surface (68) are interleaved with at least partially. As an alternative, or as a supplement to this end, at least a part of the surface portion (62, 64, 66) at least a partial surface of an outer side (62) and / or a facing the inner space of the exposed inner surface (64) formed in the form of a light window be component (56). The present invention also relates to an optical device with such a micromechanical component. Furthermore, the invention relates to a process for producing a micromechanical component and a process for producing an optical device.