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Silcon Production With A Fluidized Bed Reactor Integrated Into A Siemens-Type Process
Silcon Production With A Fluidized Bed Reactor Integrated Into A Siemens-Type Process
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机译:通过将流化床反应器集成到西门子式工艺中来生产Silcon
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摘要
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
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