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Silicon production with a fluidized bed reactor integrated into a Siemens-type process
Silicon production with a fluidized bed reactor integrated into a Siemens-type process
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机译:流化床反应器集成到Siemens型工艺中的硅生产
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摘要
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
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