首页> 外国专利> Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof

Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof

机译:III族氮化物半导体层的制造装置,III族氮化物半导体层的制造方法,III族氮化物半导体发光元件的制造方法,III族氮化物半导体发光元件及其灯

摘要

An apparatus for producing a group-III nitride semiconductor layer which forms a group-III nitride semiconductor layer on a substrate by a sputtering method, the apparatus including: a first plasma-generating region where a target containing a group-III element is disposed and the target is sputtered to generate material particles formed of a material contained in the target; and a second plasma generating region where the substrate is disposed and nitrogen-containing plasma is generated. The first plasma-generating region and the second plasma-generating region are provided inside a chamber, and the first plasma-generating region and the second plasma-generating region are separated by a shielding wall which has an opening part from which the material particles are supplied onto the substrate. Also disclosed are a method of producing a group-III nitride semiconductor layer, a method of producing a group-III nitride semiconductor light-emitting device, and a lamp thereof.
机译:一种用于通过溅射法在基板上形成III族氮化物半导体层的III族氮化物半导体层的制造装置,该装置包括:第一等离子体产生区域,在该第一等离子体产生区域中配置有含有III族元素的靶。溅射靶以产生由靶中包含的材料形成的材料颗粒;第二等离子体产生区,其中设置基板并产生含氮等离子体。第一等离子体产生区域和第二等离子体产生区域设置在腔室内,并且第一等离子体产生区域和第二等离子体产生区域由具有开口部的遮蔽壁隔开,该遮蔽壁具有用于形成材料颗粒的开口部。供应到基板上。还公开了一种制造III族氮化物半导体层的方法,一种制造III族氮化物半导体发光器件的方法及其灯。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号