Multilayer structure having semiconductor layer and layer-thickness measurement region, and thin-film photoelectric conversion device and integrated thin-film solar cell unit using same

摘要

A multilayer structure provided with a base having an unlevel surface and a semiconductor layer stacked on the base surface; wherein a portion of the base has a layer-thickness measurement region where the layer thickness of the semiconductor layer is optically measured; and the layer-thickness measurement region is provided with a reduced-surface-roughness region having surface roughness that is smaller than the surface roughness of the unlevel surface.