CAPACITIVE LINEAR DISPLACEMENT SENSOR AND CYLINDER DEVICE

摘要

A capacitive linear displacement sensor (100) includes a plunger (106), a capacitance grid (107) formed on the plunger (106), a capacitance sensor ring (126), wherein the plunger (106) is configured to move through the capacitance sensor ring (126), and a capacitive sensor portion (127) formed on an inner surface of the capacitance sensor ring (126) and configured to interact with the capacitance grid (107). The capacitive sensor portion (127) generates two positionally-varying capacitance signals related to a displacement of the plunger (106). A fluid cylinder (700) including the capacitive linear displacement sensor (100). A method of forming the capacitive linear displacement sensor.