FLUID FOR REMOVING COATING FILM FORMED BY CSD, METHOD FOR REMOVING CSD COATING FILM USING SAME, AND FERROELECTRIC THIN FILM AND PROCESS FOR PRODUCING SAME

摘要

A fluid for removing a coating film formed by CSD is sprayed or dropped onto the peripheral edge of a substrate to be subsequently heat-treated in a CSD method, the fluid comprising a mixture of one or more organic solvents and water in a weight ratio of 50/50 to 0/100, the organic solvents being selected from β-diketones, β-ketoesters, polyhydric alcohols, carboxylic acids, alkanolamines, α-hydroxycarboxylic acids, α-hydroxycarbonyl derivatives, and hydrazone derivatives. Thus, the coating film is partly removed without causing cracks or local peeling, and particle generation is prevented.