SU-8 MICRONEEDLES FOR MONITORING AND STIMULATING NEURONS

摘要

The invention relates to an SU-8 microneedle for monitoring and stimulating neurons, having a thickness of less than 100 micrometres and a length of 50 micrometres to 10 centimetres, wherein the manufacturing method enables the microneedle to be removed from the substrate without using mechanical means due to the initial coating of a rigid substrate with a layer of aluminium as a sacrificial layer and the final chemical etching of the aluminium layer for chemically removing the microneedle obtained in known intermediate photolithographic manufacturing steps.