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ZnO crystal growth method, ZnO crystal structure, and semiconductor device using ZnO crystal
ZnO crystal growth method, ZnO crystal structure, and semiconductor device using ZnO crystal
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机译:ZnO晶体生长方法,ZnO晶体结构和使用ZnO晶体的半导体器件
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摘要
A ZnO crystal growing method having the steps of: growing a low temperature growth ZnO layer on a sapphire substrate at a temperature lower than a single crystal ZnO growth temperature; thermally processing the low temperature growth ZnO layer at a temperature near to a growth temperature of a high temperature growth single crystal ZnO layer higher than the growth temperature of the low temperature growth ZnO layer; and growing a high temperature growth single crystal ZnO layer on the low temperature growth ZnO layer at a temperature higher than the growth temperature of the low temperature growth ZnO layer. ZnO crystal of good quality with a reduced number of crystal defects can be grown on a sapphire substrate.
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