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SILICON PURITY MEASURING INSTRUMENT, SILICON SORTING APPARATUS, AND SILICON PURITY MEASURING METHOD

机译:硅纯度测量仪器,硅分选装置和硅纯度测量方法

摘要

Provided is a silicon purity measuring instrument which prevents silicon from being contaminated with metals and measures the purity inside of the silicon. A silicon sorting apparatus and a silicon purity measuring method are also provided.A silicon purity measuring instrument (10) is provided with: an inspecting table; a magnetic field generator (14) which generates a magnetic field for measurement such that a magnetic flux permeates inside of the silicon disposed on the inspecting table; and a determining section (36) which determines the attenuation degree of the magnetic field after instantaneously interrupting the magnetic field for measurement. The purity inside of the silicon is identified based on the attenuation degree determined by the determining section (36).
机译:提供了一种硅纯度测量仪器,其防止硅被金属污染并测量硅内部的纯度。还提供了一种硅分选设备和硅纯度测量方法。硅纯度测定仪(10)具备:检查台;以及检测台。磁场产生器(14),该磁场产生器(14)产生用于测量的磁场,使得磁通量渗透到布置在检查台上的硅的内部;确定部(36),其在瞬时中断测量磁场之后确定磁场的衰减程度。基于由确定部分(36)确定的衰减程度来确定硅内部的纯度。

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