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NON-PLANAR CVD DIAMOND-COATED CMP PAD CONDITIONER AND METHOD FOR MANUFACTURING
NON-PLANAR CVD DIAMOND-COATED CMP PAD CONDITIONER AND METHOD FOR MANUFACTURING
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机译:非平面CVD金刚石涂覆的CMP垫调节剂及其制造方法
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摘要
The present invention relates to a composite material having non-planar geometries and edge-shaving surfaces comprising a CVD diamond coating applied to a composite substrate made from a ceramic material and a preferably unreacted carbide-forming material of various configurations and for a variety of applications.
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