CORRECTING METHOD OF THE PYROMETER COMPRISING THE CALIBRATION PROCESS OF THE COST - EFFICIENCY, AND THE SYSTEM FOR THE TEMPERATURE DETERMINATION OF THE METHOD FOR DETERMINING THE TEMPERATURE OF THE SEMICONDUCTOR WAFER AND SEMICONDUCTOR WAFER

摘要

PURPOSE: The method for correcting the pyrometer in which the correcting method of pyrometer, and the system for the temperature determination of the method for determining the temperature of the semiconductor wafer and semiconductor wafer get over the disadvantage of the prior art is offered.;CONSTITUTION: One or more thermal radiation signal measured at corrects the pyrometer(1) which is adjusted in order to intercept the thermal radiation allocated to the temperature value and it measures. The calibration sample(12) is composed of the semiconductor wafer(2) and the transparency correction layer(13) arranged on the semiconductor wafer.;COPYRIGHT KIPO 2011