PROXIMITY EXPOSURE APPARATUS, METHOD FOR CONTROLLING A SUBSTRATE TEMPERATURE IN THE PORXIMITY EXPOSURE APPARATUS AND METHOD OF MANUFACTURING A DISPLAY PANEL SUBSTRATE

摘要

PURPOSE: A proximity exposure apparatus, a method for controlling the temperature of a substrate of the proximity exposure apparatus, and a method for manufacturing a display panel substrate are provided to efficiently control the temperature of a substrate by exhausting air from the outside of the body house after the air inside a body house is suctioned. CONSTITUTION: A chuck(10) supports a substrate(1). A mask holder(20) supports a mask(2). The stage moves a chuck. A body house(30) receives the chuck, the mask holder, and the stage.