BIPOLAR TRANSISTOR STRUCTURE AND A METHOD FOR INCLUDING EMITTER-BASE INTERFACE IMPURITY, WHICH INCLUDES OXYGEN IMPURITY, FLUORINE IMPURITY, OR CARBON IMPURITY

摘要

PURPOSE: A bipolar structure and a method for including emitter-base interface impurity are provided to include a collector structure on at least part of a semiconductor substrate and a base structure in contact with the collector structure.;CONSTITUTION: A semiconductor substrate(10) includes a collector structure. The base structure is in contact with the collector structure. An emitter structure is in contact with the base structure. Interface is arranged between the emitter structure and the base structure. Impurity selected from oxygen impurity, fluorine impurity, or carbon impurity is included in the interface between the emitter structure and the base structure.;COPYRIGHT KIPO 2011