Bearing material for porous hydrostatic gas bearing and porous hydrostatic gas bearing using the same

摘要

According to the present invention , the bearing material for a porous hydrostatic gas bearing support made of stainless steel (2) and , the supported metal (2) and provided with the bonding layer 3, the porous sintered metal layer 4 which is integrally on the one surface of the via , the inorganic material particles in the grain boundaries of the porous sintered metal layer (4) is contained and dispersed , the porous sintered metal layer containing inorganic material particles 4 is 4% by weight of tin and less than 10% by weight , 10 % by weight or more and less than 40% by weight of nickel , 0.1 wt % or more and less than 0.5% by weight of phosphorus , the remainder consists of a copper weight %.