PYROMETER FOR DETECTING UV-RADIATION AND A METHOD OF USING THE SAME, CAPABLE OF DETERMINING THE TEMPERATURE OF AN INFRARED TRANSPARENT SEMICONDUCTOR WAFER

摘要

PURPOSE: A pyrometer for detecting UV-radiation and a method of using the same are provided to determine the absolute temperature of a substrate form radiation.;CONSTITUTION: A pyrometer for detecting UV-radiation comprises a detector(9), a long-pass filter(7), an activity-related unit(11), a second signal measuring unit(12), and a determining unit(13). The detector comprises an active region(10). The long-pass filter has a cutoff wavelength of 400~450nm. The activity-related unit makes the long-pass filter active or inactive. The second signal measuring unit measures a first thermal radiant signal when the long-pass filter becomes inactive, and a second thermal radiant signal when active. The determining unit determines a temperature corresponding to the thermal radiation.;COPYRIGHT KIPO 2011