ALLOY COATING DEVICE, CAPABLE OF UNIFORMLY INDUCING THE SUPPLY OF METALLIC STEAM FROM AN EVAPORATING CONTAINER TO A STEAM MIXING UNIT

摘要

PURPOSE: An alloy coating device is provided to make the thickness or component distribution of alloy film uniform by preventing the deposition difference of a target to be coated.;CONSTITUTION: An alloy coating device comprises an evaporation container(30) and a steam mixing unit(50). The evaporation container generates metallic steam(g1)(g2). The steam mixing unit is in connection with each evaporation container. The steam mixing unit blocks at least a part of a steam mixing space(A2), which is discharged to alloy steam(G). The steam mixing unit makes the mixing of steam easy. The alloy steam mixes a metallic-steam inlet space(A1) with the metallic steam. The alloy steam is deposited as the alloy film(12) of a target(10) to be coated.;COPYRIGHT KIPO 2011