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METHOD FOR MANUFACTURING THE THIN FILM THERMOELECTRIC ENERGY CONVERSION MODULE
METHOD FOR MANUFACTURING THE THIN FILM THERMOELECTRIC ENERGY CONVERSION MODULE
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机译:薄膜热电能量转换模块的制造方法
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摘要
PURPOSE: A method for manufacturing a thin film thermoelectric energy conversion module is provided to prevent the deterioration of thermoelectric performance by depositing metal compound. CONSTITUTION: A first semiconductor pattern(160a) is formed on an exposed electrode layer. A nickel layer(170) is formed on the first semiconductor pattern through a deposition process. A tin layer(180) is formed on the nickel layer through the deposition process. A first pattern is formed by removing a second photo resist pattern and a lift off resistor. A second pattern with the second semiconductor pattern is formed. The first semiconductor pattern is opposite to the second semiconductor pattern. A thermoelectric energy conversion module is formed by bonding the tin layer on the upper side of the electrode layer of the first pattern.
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