METHOD FOR MANUFACTURING A THIN FILM THERMOELECTRIC ENERGY CONVERSION MODULE WHICH IS SERIALLY CONNECTED TO A P TYPE SEMICONDUCTOR PATTERN AND AN N TYPE SEMICONDUCTOR PATTERN

摘要

PURPOSE: A method for manufacturing a thin film thermoelectric energy conversion module is provided to correct a height error and an arrangement error of an n type semiconductor pattern and a p type semiconductor pattern by using a solder ball when a substrate is bonded.;CONSTITUTION: An insulation layer(110) and an electrode layer(120) are formed on a substrate(100). A first photoresist is formed on the electrode layer. The first photoresist is patterned. A part of the insulation layer is exposed by using the patterned first photoresist. A lift-off resistor and a second photoresist are successively formed on the exposed insulation layer. The upper side of the electrode layer is partially exposed by etching the lift-off photoresistor. A first semiconductor pattern(160a) is formed on the exposed electrode layer. A first pattern is formed by removing a second photoresist pattern and the lift-off resistor. A second pattern with a second semiconductor pattern is formed. The second semiconductor pattern is opposite to the first semiconductor pattern. A solder ball is bonded between the upper side of the first pattern and the electrode layer of the substrate with the second pattern.;COPYRIGHT KIPO 2011