METHOD FOR MANUFACTURING A THIN FILM THERMOELECTRIC ENERGY CONVERSION MODULE CAPABLE OF PREVENTING THE DETERIORATION OF THERMOELECTRIC PERFORMANCE BY DEPOSITING METAL COMPOUND WITH AN EXACT COMPOSITION RATIO

摘要

PURPOSE: A method for manufacturing a thin film thermoelectric energy conversion module is provided to improve productivity by decreasing a deposition process of a plurality of insulation layers and a photoresist.;CONSTITUTION: A first semiconductor pattern(160a) is formed on an exposed electrode layer. A nickel layer(170) is formed on a first semiconductor pattern through a deposition process. A tin layer that is a bonding layer is formed on the nickel layer. A first pattern is formed by removing a second photoresist pattern and a lift off resistor and forming the bonding layer on the first semiconductor pattern. A second pattern includes a second semiconductor pattern(160b) opposite to the first semiconductor pattern. The bonding layer of the second pattern is connected to the upper side of the electrode layer of the first pattern.;COPYRIGHT KIPO 2011