METHOD FOR FORMING MASK PATTERN, CAPABLE OF PREVENTING CD INCREASE DUE TO INFLUENCE OF PATTERN DENSITY

摘要

PURPOSE: A method for forming a mask pattern is provided to prevent a bridge by inserting a scattering bar reducing pattern density. ;CONSTITUTION: A pattern is designed. The pattern has first light shielding pads and second light shielding pads(422,424). The second light shielding pads are formed in a space among the first light shielding pads. At least one scattering bar(420) is inserted into the inside of the first light shielding pads. Pattern density is reduced.;COPYRIGHT KIPO 2011