OPTICAL SYSTEM FOR REMOVING BUBBLES IN A PHOTORESIST CAPABLE OF COLLECTING AND REMOVING BUBBLES AT A TIME

摘要

PURPOSE: An optical system for removing bubbles in a photoresist is provided to collect bubbles without damaging the photoresist by applying a noncontact method using a laser beam. ;CONSTITUTION: A laser generator(101) emits a laser beam. A beam splitter(103) splits the laser beam from the laser generator into two laser beams. A mirror(107) reflects two laser beams. An optical system(109) focuses two reflected laser beams and irradiates the focused laser beam to an object. The object is comprised of a wafer(111) and a photoresist(113) coated on the wafer.;COPYRIGHT KIPO 2011