V-GROOVE SUBSTRATE FOR USING A FIBER ARRAY BLOCK AND A METHOD FOR MANUFACTURING THE SAME CAPABLE OF BONDING A SILICON SUBSTRATE AND A QUARTZ SUBSTRATE

摘要

PURPOSE: A V-groove substrate for using a fiber array block and a method for manufacturing the same are provided to prevent thermal deformation of a silicon substrate by bonding a quartz substrate at the lower part of the silicon substrate.;CONSTITUTION: A silicon substrate(120) forms a plurality of first V-grooves in order to settle an optical fiber at the upper part of the silicon substrate. The silicon substrate and the quartz substrate are bonded through a room temperature bonding method. A silicon substrate comprises a crystal plane. A plurality of second V-grooves are formed on the lower part of the silicon substrate. The quartz substrate is directly bonded to the lower part of the silicon substrate.;COPYRIGHT KIPO 2011