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V-groove substrate for using fiber array block and method of manufacturing the same
V-groove substrate for using fiber array block and method of manufacturing the same
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机译:用于使用纤维阵列块的V型槽基板及其制造方法
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摘要
The present invention relates to a V- groove substrate and a manufacturing method for an optical fiber array block , the optical fibers on the top surface has a structure having a plurality of V- grooves is bonded to the bottom surface of the silicon substrate and directly bonding a quartz substrate which can be seated . According to such an optical fiber array block for V groove substrate and a manufacturing method , the V- groove is bonded to the bottom surface of a quartz substrate formed in the silicon substrate top surface it provides an advantage that can suppress the thermal deformation of the silicon substrate . ;
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