PARTICLE COUNTING DEVICE WITH CONDENSING PARTICLE COUNTER

摘要

The present invention , comprising: a housing; Disposed in the housing and forms a fluid communication with a high pressure DI water line and branched from the high pressure DI water line , and the atomizer unit crystallized spray DI water containing particles , is disposed downstream of the atomizer unit in the housing particles having a condensation particle detection unit having a saturated group , and a condenser for condensing the working fluid from the particle -saturated with saturated the saturator , the saturated condensing optical particle counter for counting the particles to saturate the said condensed working fluid with saturated provides a measurement unit .