METHOD OF PREPARING METAL OXIDE THIN FILM STRUCTURE AND SOLID OXIDE FUEL CELL COMPRISING METAL OXIDE THIN FILM STRUCTURE PREPARED THEREBY

摘要

The present invention relates to a method for manufacturing a structure in which a metal oxide thin film is formed using a sol-gel process, and a solid oxide fuel cell (SOFC) including a metal oxide thin film structure manufactured using the method. ), The metal oxide thin film produced by the method of the present invention is a dense structure that does not penetrate gas, there is no crack or pin-hole, and the electrical thickness is reduced due to the thin thickness. As it has phase stability through low temperature process, it can not only be used as electrolyte or oxygen sensor of fuel cell, but also as thermal insulation coating, optical material, thin buffer layer of high temperature superconductivity, and insulation film in electronic device field. The application of can be expanded.;Metal oxide thin film, sol-gel method, electrolyte, dense film, metal oxide thin film structure, SOFC