A method of making a scanning probe microscope (SPM) needle needle probe using an ion beam (12) comprises positioning the probe (13, 15, 15 ', 16) such that a tip of the probe (13) on which the nanoneedle (15, 15 ') is fixed, pointing in a direction from which the ion beam (12) radiates. The alignment of the nanoneedle (15, 15 ') attached to the tip of the probe (13) is achieved by jetting the ion beam (12) towards the tip of the probe (13) where the nanoneedle (15, 15') is fixed, accomplished so that the nanoneedle is parallel to the ion beam (12).
展开▼
