Method for adjusting position of bearing element, involves measuring orientation of translation axis relative to target translation axis, where orientation of another translation axis relative to another target translation axis is measured

摘要

The method involves measuring the orientation of a translation axis relative to a target translation axis. The orientation of another translation axis relative to another target translation axis is measured. An orientation of a rotation axis relative to a target rotation axis is measured. An angle of deviation of the translation axis is determined from the former target translation axis. Independent claims are also included for the following: (1) a method for retrieving a pre-determined position on an object to be examined; (2) a computer program product; and (3) a particle beam device.