Capacitive differential pressure sensor has conductive formed silicon membrane, which is arranged between two carrier plates made of same material

摘要

The capacitive differential pressure sensor has a conductive formed silicon membrane (2), which is arranged between two carrier plates made of the same material. Multiple pressure inlet openings are provided for pressure discharge in a measuring chamber. The pressure inlet openings are arranged in the area of the deformation of the membrane such that the discharge of the measuring fluid takes place parallel to membrane surface. The deformation of membrane is generated by the measuring pressure.