Sensitivity analysis on MEMS capacitive differential pressure sensor with bossed diaphragm membrane

摘要

This paper reports on capacitive differential pressure sensor with bossed diaphragm membranes center deflection sensitivity, capacitive sensitivity, effect of temperature on center deflection and capacitive sensitivity for the aircraft altimeter. The principle of capacitive differential pressure sensor was explained. A novel and simple diaphragm modeling and wafer bonding were proposed. This sensor is analyzed with real time parameters of pressure and temperature for aircraft flying altitude. The simulation results on deflection and capacitive sensitivity shows 0.29μm/mbar and 20aF/mbar respectively for the range of pressure.