Method and apparatus for measuring the thickness of thin layers on large-area measuring upper surfaces

摘要

The invention relates to a method and device for measuring the thickness of thin layers on top of the outer surface of the measuring surfaces (12), in which at least a measuring probe (28), the at least one sensor element (29) and at least one of the sensor element (29) contains, which is associated with the cap (31) on the measuring surface (12) for detecting a measured value is placed, wherein the large measuring surface (12) into individual partial surfaces (14) is subdivided, to be tested for each partial surface (14) a matrix of measurement points (16) is determined, with a the at least one measuring probe (28) supporting device (21) along at least one line (17) of the matrix of the partial surface (14) at equidistant measuring points (16) measured values are detected and in succession for all of the lines (17) of the matrix in the partial surface (14) the measured values detected and for this partial surface (14) are evaluated.