Phases change in structure, a method for forming a phase change in layer, phase, change, - storage device, and a method for producing a phase, change, - memory device

摘要

A phase change in structure comprises a first phase change material layer pattern and a second phase change material layer pattern. The first phase change material layer pattern fills a structure with a high aspect ratio partially, and the second phase change material layer pattern fills the structure with the high aspect ratio. The first phase change material layer pattern contains a first phase change material, and the second phase change material layer pattern comprises a second phase change material with a composition, the substantially different from the composition of the first phase change material is.