Volume acoustic resonator structures comprising a single material acoustics coupling layer, which has an inhomogeneous acoustic property

摘要

According to a representative embodiment, a baw - resonator structure: a first baw - resonator comprising a first lower electrode, a first upper electrode and a first piezoelectric layer, which between the first lower electrode and the first upper electrode is disposed; and a second baw - resonator comprising a second lower electrode, a second upper electrode and a second piezoelectric layer, which between the second bottom electrode and the second upper electrode is arranged. The baw - resonator structure also has a single material acoustics coupling layer is disposed between the first and second baw - resonator to. The individual material acoustics coupling layer has an inhomogeneous acoustic property by means of a thickness of the individual material acoustics coupling layer on.