Measuring device for the automated testing of wafers

摘要

Measuring device for the automated testing of wafers,characterized by the,that this comprises:a loading device, whereby, at a side of at least an area for the pretreatment, an area for the cleaning and extraction, an area for the rearwardly directed recording and separation and a region for the reaction and the receptacle of the wafers are formed, and these are used in order to carry out a filling and in this connection, the measurement object is being tested and in order to carry out the reaction,a mechanism which is connected with the charger, and this is used to the measurement operation the loading device of the shaking or vibrating, and there is a desired mixture from the retention of the object under measurement in the loading device as well as of the starting material and of the arranged wafers, a temperature control mechanism which is connected with the charger, and this is used for the measurement operation the temperature in the loading device to control,a region of the safe..