Testing device for determining preset characteristics of electronic component i.e. wafer, has transporting device moving holding devices from assembling position to measuring position, and measuring device determining preset characteristics

摘要

The testing device has two holding devices (1a, 1b) for accommodating an electronic component i.e. wafer. A transporting device (3) moves the holding devices from an assembling position to a measuring position. A measuring device determines preset characteristics of the electronic component. The holding devices are arranged in the measuring position on cross tables (2a, 2b). An orientation unit (4) with a device for optical position determination is arranged at the assembling position. The holding device is formed as a vacuum clamping system. An independent claim is also included for a method for determining preset characteristics of an electronic component.