a scanning electron microscope and scanning electron microscope detektorsystem with a corresponding detektorsystem

摘要

The invention relates to a detector system, for the sample chamber of a scanning electron microscope, by means of which signals are simultaneously detected in transmission, corresponding to a light field contrast and a dark field contrast. The detector system (14) comprises four detectors (15-18) on a plane (25), between which a hole (19) for free access of electrons is located. Behind said hole (19), a further detector (27) is arranged on a second plane (26). The detectors are preferably diodes. The detectors (15, 16, 17, 18) in the first plane (25), which is nearest the sample, serve to generate signals, corresponding to a dark field contrast. The further detector (27), more distant from the sample, detects signals corresponding to a light field contrast. Large dead spaces, which are not sensitive to electrons, between the diodes and around the hole (19), can be avoided, by the offset arrangement of four diodes (15, 16, 17, 18) in the first plane (25).