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The device has an optical fiber of the interferometric analysis of the state of the surface of an object

机译:该设备具有对物体表面状态进行干涉分析的光纤

摘要

The present invention relates to an optical device of the interferometric analysis of the surface state of an object (2), comprising a light source (1); an optical fiber (42) adapted to receive the incident light wave to be transmitted to the object (2); a detector (9) which is able to detect a combination between a light wave (45) which is reflected by the optical fiber and a light wave (46) sent by the object; and in which the optical fiber (42) has a free end in the form of a cone with an apex angle of between 15 and 25 degrees, the tip of the cone having dimensions smaller than 50 × 50 nm, and the tip of the cone is disposed, in use, at a distance from the surface of the object between 5 and 50 μm.
机译:本发明涉及一种对物体(2)的表面状态进行干涉分析的光学装置,其包括光源(1);光纤(42),适于接收入射光并传输到物体(2)。检测器(9),其能够检测由光纤反射的光波(45)和由物体发送的光波(46)之间的组合;并且其中光纤(42)具有圆锥形的自由端,其锥顶角在15到25度之间,圆锥体的顶端尺寸小于50×50 nm,圆锥体的顶端在使用时,将其设置在距物体表面5至50μm的距离处。

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