Method for measuring shape of optical surface of test object by measuring device, involves arranging test object on object holder, setting multiple measurement configuration, and interferometric measuring area of optical surface

摘要

The method involves arranging a test object (12) on an object holder (18), setting multiple measurement configuration, and interferometric measuring an area (22) of an optical surface (14) in each of the set measurement configuration. The area of the optical surface illuminates a measuring wave (20) which is transmitted from a measuring head (16). A diffractive optical module is configured to apply the effect of a non-spherical mirror surface on a wavefront of the measuring wave during reflection of the measuring wave on diffractive optical module.