AIR-FLOATING CARRYING DEVICE AND SYSTEM WHICH ARE DRIVEN BY LINEAR MOTOR

摘要

PROBLEM TO BE SOLVED: To provide an air-floating carrying system driven by a linear synchronous motor, good in energy efficiency, large in drive force and excellent in practical utility.;SOLUTION: The air-floating carrying device is configured by, as main compositional units, including: a floating travel passage 1 having a guide groove 2 in the center and having a static-pressure thrust bearing function by pressurized air on an upper surface and a side surface of the guide groove 2; an air-floating carrying stage 3 which carries articles while floating on the upper surface of the floating travel passage 1; guiders 4 fitted in the guide groove 2, for guiding the advancing direction of the carrying stage 3 in noncontact manner by the static-pressure thrust bearing function of the side surface of the guide groove 2; and the linear synchronous motor including a coil set 5 of A phase and a coil set 5 of B2 phase with a phase different from that of the A phase by 90 degrees, the coil sets being arranged inside the guide groove 2 for driving the carrying stage 3, as a stator, and a set of magnets 6 arranged while alternately changing a pole between north and south poles on a rear surface of the carrying stage 3 via suitable yokes 7, respectively, as a mover.;COPYRIGHT: (C)2012,JPO&INPIT