DEFLECTOR ARRAY, MANUFACTURING METHOD OF DEFLECTOR ARRAY, LITHOGRAPHY APPARATUS, AND MANUFACTURING METHOD OF ARTICLE

摘要

PROBLEM TO BE SOLVED: To provide a deflector array in which temperature rise of the electrode pair of a deflector is minimized, and which is advantageous to improve the throughput.;SOLUTION: The deflector array 13 comprises a plurality of deflectors 31 for deflecting a charged particle beam 30. An electrode pair 33 installed for an aperture 32 through which the charged particle beam 30 passes and configuring the deflector 31, and a control circuit 34 applying a voltage to the electrode pair 33 are formed into a laminate structure consisting of at least two layers of a first layer 40 and a second layer 41. At least one layer (the first layer 40) has a heat insulation part 42 between the electrode pair 33 and the control circuit 34.;COPYRIGHT: (C)2012,JPO&INPIT