METHOD OF PRODUCING BASE MATERIAL FOR SUPERCONDUCTIVE THIN FILM, BASE MATERIAL FOR SUPERCONDUCTIVE THIN FILM AND SUPERCONDUCTIVE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of improving safety in a CeOcap layer deposition step and lowering cost of a superconductive thin film while improving electric conductive properties.SOLUTION: A method of producing a base material for superconductive thin film comprises: a first step of depositing a bed layer on a metal base plate; a second step of forming an orientation layer on the bed layer by an ion beam assisted deposition; and a third step of forming a cap layer comprising CeOon the orientation layer by a sputtering. The third step is conducted under a mixed gas atmosphere of inert gas (for example, argon) and oxygen in which the oxygen partial pressure is 2.0×10to 2.9×10Pa.